SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Width mm
108
Ambient Temperature
5 to 60°C
Brand
SMC
Valve Material
Aluminium
Seal Material
FKM
Feature
Bellows seal
Height mm
38
Application
High vacuum angle valve for semiconductor and vacuum applications
Operation
Normally Closed
Body Material
Aluminium
Angle
Angle Valve
Series
XL2
Length mm
60
Actuation
Single acting
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Height mm
Length mm
Feature
Seal Type
Actuation
Operation
Application
Angle
Actuator Working Temperature
List Price
121
48
74
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
171
66
98
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows seal
Single acting
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
Normally Closed
–
–
–
–
Available to Order
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
High Vacuum
–
–
Available to Order
171
66
98
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Bellows seal
–
Single acting
Normally Closed
High vacuum applications
–
–
Available to Order
108
38
59
–
–
Normally Closed
–
–
–
–
Available to Order
–
–
–
–
–
–
Normally Closed Bellows Seal
High Vacuum Angle Valve
–
–
Available to Order
–
–
–
–
–
–
Normally Closed Bellows Seal
High Vacuum
–
–
Available to Order
–
–
–
–
–
Normally Closed
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
121
48
74
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Bellows seal
Normally Closed
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
Available to Order
–
–
–
–
Bellows seal
–
Normally Closed
High Vacuum
–
–
Available to Order
–
–
–
–
–
–
–
High Vacuum
Normally Closed
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
185
79
110
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order