Details
Width mm
108
Actuation
Normally Closed
Brand
SMC
Seal Material
FKM
Length mm
59
Height mm
38
Body Material
Aluminium
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Height mm
Length mm
Feature
Operation
Actuation
Seal Type
Ambient Temperature
Application
Valve Material
Angle
Actuator Working Temperature
List Price
121
48
74
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
171
66
98
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Single acting
Bellows seal
–
–
–
–
–
Available to Order
–
–
–
–
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
5 to 60°C
High Vacuum
–
–
–
Available to Order
171
66
98
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Bellows seal
Normally Closed
Single acting
–
–
High vacuum applications
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
–
High Vacuum Angle Valve
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
5 to 60°C
High Vacuum
–
–
–
Available to Order
–
–
–
–
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
121
48
74
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
Normally Closed
Bellows seal
–
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
–
–
Available to Order
–
–
–
–
Normally Closed
–
Bellows seal
–
High Vacuum
–
–
–
Available to Order
–
–
–
–
–
–
–
–
High Vacuum
–
Normally Closed
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
185
79
110
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order


