SMC High Vacuum Angle Valve
Product Code: XLA-40-2M9//...
Available to Order
tech sheet
Details
Width mm
171
Brand
SMC
Seal Type
Bellows seal
Seal Material
FKM
Length mm
98
Operation
Normally Closed
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Body Material
Aluminium
Series
XL2
Height mm
66
Actuation
Single acting
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Height mm
Length mm
Actuation
Operation
Ambient Temperature
Feature
Application
Valve Material
Angle
Actuator Working Temperature
List Price
121
48
74
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High Vacuum
–
–
–
Available to Order
171
66
98
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Single acting
Normally Closed
–
Bellows seal
High vacuum applications
–
–
–
Available to Order
108
38
59
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
High Vacuum Angle Valve
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
5 to 60°C
–
High Vacuum
–
–
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
121
48
74
Normally Closed
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
High Vacuum
–
–
–
Available to Order
–
–
–
–
–
–
–
High Vacuum
–
Normally Closed
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
185
79
110
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
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–
–
–
–
–
–
–
–
–
–
Available to Order
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–
–
–
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–
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–
Available to Order