Details
Actuation
Normally Closed
Brand
SMC
Height mm
48
Width mm
121
Valve Material
Aluminium
Length mm
74
Seal Type
Bellows seal
Seal Material
FKM
Application
High vacuum angle valve for semiconductor and vacuum applications
Body Material
Aluminium
Series
XL2
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
