SMC High Vacuum Angle Valve
Product Code: XLA-25-2...
Available to Order
tech sheet
Details
Actuation
Normally Closed
Brand
SMC
Height mm
48
Width mm
121
Valve Material
Aluminium
Length mm
74
Seal Type
Bellows seal
Seal Material
FKM
Application
High vacuum angle valve for semiconductor and vacuum applications
Body Material
Aluminium
Series
XL2
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Feature
Height mm
Width mm
Length mm
Operation
Actuation
Ambient Temperature
Application
Angle
Actuator Working Temperature
List Price
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48
121
74
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–
–
–
–
Available to Order
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–
–
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–
–
–
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–
Available to Order
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
66
171
98
Normally Closed
Single acting
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–
–
–
Available to Order
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–
–
–
–
Normally Closed
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–
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–
Available to Order
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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–
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Normally Closed Bellows Seal
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5 to 60°C
High Vacuum
–
–
Available to Order
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66
171
98
–
–
–
–
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–
Available to Order
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–
Available to Order
Bellows seal
–
–
–
Normally Closed
Single acting
–
High vacuum applications
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–
Available to Order
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38
108
59
–
Normally Closed
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–
Available to Order
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Normally Closed Bellows Seal
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–
High Vacuum Angle Valve
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–
Available to Order
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Normally Closed Bellows Seal
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5 to 60°C
High Vacuum
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–
Available to Order
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–
Normally Closed
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Available to Order
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Available to Order
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Normally Closed
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High Vacuum
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–
Available to Order
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High Vacuum
Normally Closed
5 to 60°C
Available to Order
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–
Available to Order
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79
185
110
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Available to Order
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Available to Order
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Available to Order
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Available to Order