Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Seal Material
Body Material
Height mm
Series
Length mm
Feature
Operation
Actuation
Seal Type
Ambient Temperature
Application
Valve Material
Angle
Actuator Working Temperature
List Price
121
FKM
Aluminium
48
XL2
74
–
–
–
–
–
–
–
–
–
Available to Order
171
FKM
Aluminium
66
XL2
98
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
Single acting
Bellows seal
–
–
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
5 to 60°C
High Vacuum
–
–
–
Available to Order
171
FKM
Aluminium
66
XL2
98
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
Bellows seal
Normally Closed
Single acting
–
–
High vacuum applications
–
–
–
Available to Order
108
FKM
Aluminium
38
XL2
59
–
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
Normally Closed Bellows Seal
–
–
–
High Vacuum Angle Valve
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
Normally Closed Bellows Seal
–
–
5 to 60°C
High Vacuum
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
121
FKM
Aluminium
48
XL2
74
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
Normally Closed
Bellows seal
–
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
Normally Closed
–
Bellows seal
–
High Vacuum
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
–
–
–
–
High Vacuum
–
Normally Closed
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
185
FKM
Aluminium
79
XL2
110
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
FKM
Aluminium
–
XL2
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order


