SMC Slit Valve
Product Code: XGT222-46236-1F...
Available to Order
tech sheet
Details
Series
XGT
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Brand
SMC
Actuation
Cassette Type Standard
Material
Gate O-ring FKM
Manufacturer
SMC
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Model
Valve Material
Accessories
List Price
XGT223-46236-1F
FKM (Gate O-ring Material)
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Available to Order